System-Level Simulation of MEMS by Means of Model Order Reduction

Abstract

The rapid progress in microelectromechanical

systems (MEMS) and the evolution from a limited set

of well-established applications, examples, in

automotive industry, print heads, and digital light

projection, to other fields mainly driven by consumer

applications opens a new market for these devices. It

simultaneously creates the need for fast, efficient, and

adequate design and optimization tools not only for

stand-alone devices, but also for entire multiphysics

microsystems comprising the MEMS component, the

attached control and read-out circuitry and the package,

while additionally considering environmental impacts

potentially affecting the system functionality.